| 논문명 |
하부 플레넘 구조물 조건을 고려한 클린룸의 편류 개선 방법 / Improving Vertical Airflow Uniformity Considering the Structures of the Lower Plenum in a Cleanroom |
| 저자명 |
김영섭(Young Sub Kim) ; 하만영(Man Yeong Ha) |
| 발행사 |
대한설비공학회 |
| 수록사항 |
설비공학논문집, Vol.20 No.01 (2008-01) |
| 페이지 |
시작페이지(17) 총페이지(9) |
| ISSN |
1229-6422 |
| 주제분류 |
환경및설비 |
| 주제어 |
클린룸 ; 하부 플레넘 ; 억세스 플로어 ; 개구율 ; 속도분포 ; 정압분포//Cleanroom ; Lower plenum ; Access floor ; Opening ratio ; Velocity profile ; Static pressure distribution ; |
| 요약1 |
본 연구에서는 하부 플레넘의 기류 속도분포를 예측하고, 기둥, 덕트 및 배관, 장비류 등 내부구조물의 유형에 따른 정압강하를 예측하였다. 이러한 과정을 통해 보다 정확하게 하부 플레넘의 정압분포를 계산하여, 클린룸 내부기류를 균일하게 제어하는 방법을 제시하고자 한다. |
| 요약2 |
To achieve the unidirectional airflow in a cleanroom, we need to predict acc-urately the static pressure losses at the lower plenum and to control properly the opening pressure ratio of access floor panels based on these pressure losses. At first, the present study proposed a correlation to predict the velocity distribution at the lower plenum, because the accuracy to predict pressure losses at the lower plenum depends on how to calculate the velocity correctly against the inner structures at the lower plenum. In the second place, this study proposed correlations which considered the effect of inner structures such as columns, ducts and equipments at the lower plenum on pressure losses. In order to test the accuracy of these correlations, we compared air flow patterns before regulating the opening ratio of access floor with those after regulating. Results after regulating the opening ratio of access floor show good unidirectional uniform airflow pattern. So the present method can be used as an important tool to control the air flow in a cleanroom. |
| 소장처 |
대한설비공학회 |