| 요약2 |
Clean Room technology is used in a wide variety of areas, such as microelectronics, pharmaceuticals, the food industry, microsystems, medical engineering, etc. But there are few architectural approaches for it because of its industry oriented characteristic. We have analyzed the operational characteristics of the Industrial Clean Room(ICR) in three cases which is actually operating now for the validation of research. As a result of this research, we find out several architectural considerations for the flow planning, for control of vibrations and for the air current control in the architectural design phase for clean room construction and verify these on that cases. These results can provide meaningful implication and basic clue for the architectural considerations on the Industrial Clean Room. |